X-ray Photoelectron Spectroscopy- XPS

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X-ray Photoelectron Spectroscopy [ XPS ]

Elemental composition of the surface (top 110 nm usually)

Empirical formula of pure materials

Elements that contaminate a surface

Chemical or electronic state of each element in the surface

Uniformity of elemental composition across the top surface (or line profiling or mapping)

Uniformity of elemental composition as a function of ion beam etching (or depth profiling)

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